The films are then stacked, compressed and sintered together. In order to form the electrode layers, a metal paste, for example, a silver-palladium paste or a paste containing copper, can be applied to the films by a screen-printing process. The piezo actuator is preferably a monolithic multilayer actuator which is produced from thin films of a piezoelectric material, for example, lead zirconate-titanate (PZT). Y10T- TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION.Y10- TECHNICAL SUBJECTS COVERED BY FORMER USPC.Y- GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS AND DIGESTS.H10N30/07- Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base.H10N30/508- Piezoelectric or electrostrictive devices having a stacked or multilayer structure adapted for alleviating internal stress, e.g.connection electrodes of multilayered piezoelectric or electrostrictive parts H10N30/063- Forming interconnections, e.g.H10N30/06- Forming electrodes or interconnections, e.g.H10N30/872- Connection electrodes of multilayer piezoelectric or electrostrictive devices, e.g.H10N30/87- Electrodes or interconnections, e.g.H10N30/50- Piezoelectric or electrostrictive devices having a stacked or multilayer structure.H10N30/00- Piezoelectric or electrostrictive devices.H10N- ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR. H10- SEMICONDUCTOR DEVICES ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR.Assignors: EPCOS AG Status Active legal-status Critical Current Anticipated expiration legal-status Critical Links Assignors: LAUSSERMAYER, MARKUS Application granted granted Critical Publication of US8638025B2 publication Critical patent/US8638025B2/en Assigned to TDK ELECTRONICS AG reassignment TDK ELECTRONICS AG CHANGE OF NAME (SEE DOCUMENT FOR DETAILS). Assignors: GABL, REINHARD, RESZAT, JAN-THORSTEN, RINNER, FRANZ Assigned to EPCOS AG reassignment EPCOS AG ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.) Filing date Publication date Priority claimed from DE102008038227 external-priority Application filed by Epcos AG filed Critical Epcos AG Publication of US20120019107A1 publication Critical patent/US20120019107A1/en Assigned to EPCOS AG reassignment EPCOS AG ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Original Assignee Epcos AG Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.) ( en Inventor Reinhard Gabl Franz Rinner Jan-Thorsten Reszat Markus Laussermayer Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.) Active Application number US13/023,819 Other versions US20120019107A1 Google Patents Piezo actuator with external electrode soldered to outer faceÄownload PDF Info Publication number US8638025B2 US8638025B2 US13/023,819 US201113023819A US8638025B2 US 8638025 B2 US8638025 B2 US 8638025B2 US 201113023819 A US201113023819 A US 201113023819A US 8638025 B2 US8638025 B2 US 8638025B2 Authority US United States Prior art keywords piezo actuator stack wire mesh actuator according wire Prior art date Legal status (The legal status is an assumption and is not a legal conclusion. Google Patents US8638025B2 - Piezo actuator with external electrode soldered to outer face US8638025B2 - Piezo actuator with external electrode soldered to outer face
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